Wafer-scale graphene transferFor graphene, a single atom thick layer of graphite, to be of relevance for industrial applications in sensors and MEMS the graphene should be fabricated on the same scale as electronics are made: wafers. While wafer-scale growth is currently achieved in this project. Wafer-scale transfer of a single-atom thin layer of material is extremely challenging. The proportions of handling a graphene sheet on a wafers is similar to handling a single sheet of A4 with a diameter of several km! In this project you will focus on the delicate transfer procedure and study different dry and wet routes towards wafer-scale layer transfer in a way compatible with semiconductor fabrication. After this the technique will be demonstrated by fabricating full wafer arrays of test structures.
AssignmentThe student will perform the fabrication in the EKL cleanrooms and will get training to use the equipment. The project will consist of the following tasks:
- Stuyding different routes towards wafer-scale transfer
- Fabrication of test structures using transfer technique of choice
RequirementsBackground in micro-electronics or microfabrication.
dr.ir. Sten Vollebregt
Electronic Components, Technology and Materials Group
Department of Microelectronics
Last modified: 2016-02-25