dr. B. Morana

Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Jul 2015): Silicon carbide thin films for MEMS nanoreactors for in-situ transmission electron microscopy
Promotor: Lina Sarro, Frederik Creemer

Themes: MEMS Technology

Projects history

MEMS nanoreactors for atomic-scale microscopy of nanomaterials under industrially relevant conditions

MEMS nanoreactors are used to study chemical reactions in high-resolution microscopes

  1. Quantum Signature of a Squeezed Mechanical Oscillator
    A. Chowdhury; P. Vezio; M. Bonaldi; A. Borrielli; F. Marino; B. Morana; G. A. Prodi; P. M. Sarro; E. Serra; F. Marin;
    Physical Review Letters,
    Volume 124, pp. 023601, 2020. DOI: https://doi.org/10.1103/PhysRevLett.124.023601

  2. Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration
    L.M. Middelburg; H.W. van Zeijl; S. Vollebregt; B. Morana; GuoQi Zhang;
    IEEE Sensors,
    Volume 20, Issue 19, pp. 11265-11274, 2020. DOI: 10.1109/JSEN.2020.2998915

  3. Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments
    Jiarui Mo; L.M. Middelburg; B. Morana; H.W. Van Zeijl; S. Vollebregt; GuoQi Zhang;
    IEEE Sensors,

  4. Calibrated quantum thermometry in cavity optomechanics
    Chowdhury, Avishek; Vezio, Paolo; Bonaldi, Michele; Borrielli, Antonio; Marino, Francesco; Morana, Bruno; Pandraud, Gregory; Pontin, Antonio; Prodi, Giovanni; Sarro, Lina; Serra, Enrico; Marin, Francesco;
    Quantum Science and Technology,

  5. Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes
    Cinzia Silvestri; Michele Riccio; René H. Poelma; Aleksandar Jovic; Bruno Morana; Sten Vollebregt; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
    Volume 14, Issue 20, pp. 1800614, 2018. DOI: 10.1002/smll.201800614

  6. Imaging Correlations in Heterodyne Spectra for Quantum Displacement Sensing
    Pontin, A.; Lang, J. E.; Chowdhury, A.; Vezio, P.; Marino, F.; Morana, B.; Serra, E.; Marin, F.; Monteiro, T. S.;
    Physical Review Letters,
    2018. DOI: https://doi.org/10.1103/PhysRevLett.120.020503

  7. Wafer-Scale Integration for Semi-Flexible Neural Implant Miniaturization
    Marta Kluba; Bruno Morana; Angel Savov; Henk Van Zeijl; Gregory Pandraud; Ronald Dekker;
    In Proceedings Eurosensors,
    pp. 941, 2018. DOI: https://doi.org/10.3390/proceedings2130941

  8. Effect of droplet shrinking on surface acoustic wave response in microfluidic applications
    Thu Hang Bui; Van Nguyen; Sten Vollebregt; Bruno Morana; Henk van Zeijl; Trinh Chu Duc; P.M. Sarro;
    Applied Surface Science,
    Volume 426, pp. 253-261, 2017.

  9. Liquid identification by using a micro-electro-mechanical interdigital transducer
    Thu Hang Bui; Bruno Morana; Atef Akhnoukh; Trinh Chu Duc; Pasqualina M Sarro;
    Volume 142, Issue 5, pp. 763-771, 2017.

  10. Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity
    Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; GuoQi Zhang; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 266-269, 2017.

  11. A mixing surface acoustic wave device for liquid sensing applications: Design, simulation, and analysis
    T.H. Bui; B. Morana; T. Scholtes; T. Chu Duc; P.M. Sarro;
    Journal of Applied Physics,
    Volume 120, Issue 7, pp. 074504, 2016.

  12. Control of recoil losses in nanomechanical SiN membrane resonators
    A. Borrielli; L. Marconi; F. Marin; F. Marino; B. Morana; G. Pandraud; A. Pontin; G. A. Prodi; P. M. Sarro; E. Serra; M. Bonaldi;
    Physical Review B,
    Volume 94, pp. 121403, 2016.

  13. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
    Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
    Volume 8, pp. 8266-8275, 2016.

  14. Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
    E. Serra; M. Bawaj; A. Borrielli; G. Di Giuseppe; S. Forte; N. Kralj; N. Malossi; L. Marconi; F. Marin; F. Marino; B. Morana; R. Natali; G. Pandraud; A. Pontin; G. A. Prodi; M. Rossi; P. M. Sarro; D. Vita;
    AIP Advances,
    Volume 6, pp. 065004, 2016.

  15. Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators
    S. Thomas; A. Jovic; B. Morana; F. Buja; A. Gkouzou; G. Pandraud; P.M. Sarro;
    In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
    pp. 1144-1147, 2016.

  16. Effect of the interruption of the propagation path on the response of surface acoustic wave transducers
    Thu Hang Bui; An Tran; Bruno Morana; Jia Wei; Trinh Chu Duc; P.M. Sarro;
    In Proceedings of the IEEE Sensors conference,

  17. All-SiC surface micromachined nanoreactor for in-situ transmission electron microscopy
    B. Morana; C. Silvestri; J.F. Creemer; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 753-756, 2016.

  18. Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials
    G. Fiorentino; B. Morana; S. Forte; P.M .Sarro;
    Journal of Vacuum Science and Technology A,
    Volume 33, pp. 01A142, 2015.

  19. A measurement apparatus for switching losses based on an heat-flux sensor
    Iero, Demetrio; Della Corte, Francesco G.; Fiorentino, Giuseppe; Sarro, Pasqualina M.; Morana, B.;
    In AISEM Annual Conference,
    pp. 1-4, 2015.

  20. SAW device for liquid vaporization rate and remaining molecule sensing
    Thu Hang Bui; Bruno Morana; An Tran; Tom Scholtes; Trinh Chu Duc; Pasqualina M. Sarro;
    In IEEE Sensors Conference,

  21. Silicon Carbide Technologies applied to MEMS Nanoreactors for in-situ Transmission Electron Microscopy
    Bruno Morana;
    PhD thesis, Delft University of Technology, 2015.

  22. Atomic-scale imaging of Pt and Pd nanoparticle catalysts during CO oxidation at 1 Bar reaction conditions
    Vendelbo, SB; Elkjaer, CF; Puspitasari, I; Creemer, JF; Dona, P; Mele, L; Morana, B; Nelissen, BJ; Roobol, S; Rijn, R van; Helveg, S; Kooyman, PJ;
    Microscopy and Microanalysis,
    Volume 20, Issue S3, pp. 1570-1571, 2014.

  23. Stiction-Induced Sealing of Surface Micromachined Channels
    B Morana; RH Poelma; G Fiorentino; J Wei; JF Creemer; PM Sarro;
    Journal of Microelectromechanical Systems,
    Volume 23, Issue 2, pp. 459-470, 2014.

  24. Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings
    Poelma, RH; Morana, Bruno; Vollebregt, Sten; Schlangen, Erik; van Zeijl, HW; Fan, Xuejun; Zhang, GuoQi;
    Advanced Functional Materials,
    Volume 24, Issue 36, pp. 5737-5744, 2014.

  25. Visualization of oscillatory behaviour of Pt nanoparticles catalysing CO oxidation
    Vendelbo, SB; Elkj{\ae}r, CF; Falsig, H; Puspitasari, I; Dona, P; Mele, L; Morana, B; Nelissen, BJ; Rijn, R van; Creemer, JF; Kooyman, PJ; Helveg, S;
    Nature Materials,
    Volume 13, Issue 9, pp. 884-890, 2014.

  26. Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications
    C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; GuoQi Zhang; P.M. Sarro;
    In IEEE Sensors,
    pp. 827-830, 2014.

  27. CNT bundles growth on microhotplates for direct measurement of their thermal properties
    C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; GuoQi Zhang; P.M. Sarro;
    In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
    San Francisco, USA, Jan. 2014.

  28. Atomic-scale imaging of catalysts at 1 bar reaction conditions
    Elkjaer, CF; Vendelbo, SB; Puspitasari, I; Dona, P; Mele, L; Morana, B; Rijn, R van, Nelissen, BJ; Creemer, JF; Kooyman, PJ; Helveg, S;
    In Abstracts Workshop TAILOR-2014,
    pp. 49, 2014.

  29. Heat flux sensor for power loss measurements of switching devices
    Iero, Demetrio; Corte, Francesco G Della; Fiorentino, Giuseppe; Sarro, Pasqualina M; Morana, B;
    In Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on,
    IEEE, pp. 327--330, 2013.

  30. Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates
    Morana, B; Fiorentino, G; Pandraud, G; Creemer, JF; Sarro, PM;
    In Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on,
    IEEE, pp. 484--487, 2013.

  31. Stiction-driven sealing of surface micromachined channels
    B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
    In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
    Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202.

  32. An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
    J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
    In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622.

  33. In situ HRTEM of a catalyst using a nanoreactor at 1 bar
    S.B. Vendelbo; J.F. Creemer; S. Helveg; B. Morana; L. Mele; A.M. Molenbroek; P.M. Sarro; H.W. Zandbergen; P.J. Kooyman;
    In Netherlands Catalysis and Chemistry Conference (NCCC-XII),
    Noordwijk, pp. 332, Feb. 2011.

  34. A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
    B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
    In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
    Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441.

  35. Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
    L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
    J. Micromech. Microeng.,
    Volume 20, 2010.

  36. LPCVD amorphous SiCx for freestanding electron transparent windows
    B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
    In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
    Wanchai, Hong Kong, IEEE, pp. 572-575), 2010.

  37. Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
    F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
    In Proceedings of IEEE Sensors 2009 Conference,
    Christchurch, New Zealand, pp. 799-802, 2009.

  38. Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition
    L. Mele; B. Morana; C.R. de Boer; J.F. Creemer; P.M. Sarro;
    In Proceeding title: Proceedings of the Eurosensors XXIII Conference,
    Lausanne, Switzerland, pp. 1531-1534, 2009.

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Last updated: 10 Feb 2020