personal profile Sten Vollebregt

Assistant Professor

Expertise: Integration of graphene and carbon nanotubes in semiconductor technology

Themes: MEMS Technology

Contact details

Group: Electronic Components, Technology and Materials (ECTM)
Department of Microelectronics
Room:DI 00.044
Phone:+31(0)15 27 86788

List of publications

Google Scholar profile

Sten Vollebregt was born in in Delft, The Netherlands, in 1984. He received his B.Sc. and M.Sc. (both cum laude) in Electrical Engineering in 2006 and 2009, respectively. In between his B.Sc. and M.Sc. he was full-time member of the executive board of the Delftsche Studenten Bond for a year. For his master thesis, he investigated the growth of carbon nanotubes at NanoLab, Newton, MA, USA and AIXTRON, Cambridge, UK. End of 2009 he started his Ph.D. thesis in the Thin-film Transistor group on low temperature high-density growth of carbon nanotubes for application as vertical interconnects in 3D monolithic (device level) integrated circuits. He graduated in 2014, and is now working on the development of a full-wafer graphene process for the fabrication of sensors.


ET4icp IC technology lab

EKL clean room experience in processing bipolar transistors


Wafer-scale fabrication of graphene for sensing applications

Projects history

Carbon nanotube and atomic layer based solid-state supercapacitors

Carbon nanotubes as vertical interconnect in 3D integrated circuits

Last updated: 25 Sep 2017